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3寸單拋硅片參數及其規格

生長方式: CZ
直徑: 76.2+/-0.2mm
型號/摻雜：P/B, N/Ph, N/As, N/Sb

晶向: <100>, <111>, <110> +/-0.5度

電阻率: 0.0001-100 (Ω·cm)
氧含量范圍: 12-19 (ppm(New ASTM))
碳含量:≤3×10 16（atoms/cm3）
厚度: 380+/-25um
總厚度變化TTV: < 10(μm)
注:具體規格請對照下表, 下單或詢價時請告知產品號，加黑部分為推薦產品，如你對電阻率不要求可以考慮購買此項。

	電阻	其它指標
SICB12-3380S	10-100 ohm-cm	CZ單晶硅片,P/B,<100>,單拋, 3",380um厚
SICB11-3380S	1-10 ohm-cm
SICB1-2-3380S	0.01-0.1 ohm-cm
SICB1-3-3380S	0.001-0.01ohm-cm
SICB1-33-3380S	0-100 ohm-cm
SICP12-3380S	10-100 ohm-cm	CZ單晶硅片,N/, <100>, 單拋, 3", 380um厚
SICP11-3380S	1-10 ohm-cm
SICP1-2-3380S	0.01-0.1 ohm-cm
SICP1-3-3380S	0.001-0.1 ohm-cm
SICP1-33-3380S	0-100 ohm-cm
SICB22-3380S	10-100 ohm-cm	CZ單晶硅片,P/B,<1>,單拋, 3",380um厚
SICB21-3380S	1-10 ohm-cm
SICB2-2-3380S	0.01-0.1 ohm-cm
SICB2-33-3380S	0-100 ohm-cm
SICP22-3380S	10-100 ohm-cm	CZ單晶硅片,N/Ph,<1>,單拋, 3",380um厚
SICP21-3380S	1-10 ohm-cm
SICP2-2-3380S	0.01-0.1 ohm-cm
SICP2-33-3380S	0-100 ohm-cm
SICA1-3-3380S	0.001-0.005 ohm-cm	CZ單晶硅片,N/, <100>, 單拋, 3", 380um厚
SICA2-3-3380S	0.001-0.005 ohm-cm	CZ單晶硅片,N/, <111>, 單拋, 3", 380um厚
SICS1-2-3380S	0.01-0.02 ohm-cm	CZ單晶硅片,N/, <100>, 單拋, 3", 380um厚
SICS2-2-3380S	0.01-0.02 ohm-cm	CZ單晶硅片,N/, <111>, 單拋, 3", 380um厚
SICB31-3380S	1-10 OHM-CM	CZ單晶硅片,P/B, <110>, 單拋, 3", 380um厚
SICP31-3380S	1-10 OHM-CM	CZ單晶硅片,N/, <110>, 單拋, 3", 380um厚